GeAsSeTe/GeAsSe Pedestal Waveguides for Long-Wave Infrared Tunable on-Chip Spectroscopy
A dry-etched pedestal chalcogenide waveguide platform, designed for use in long-wave IR spectrometer applications, is demonstrated, fabricated and optically characterized. The optical layers were deposited on pre-patterned dry-etched silicon pedestals. An exceptionally low waveguide propagation loss...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2024-02-01
|
Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/11/3/201 |