GeAsSeTe/GeAsSe Pedestal Waveguides for Long-Wave Infrared Tunable on-Chip Spectroscopy
A dry-etched pedestal chalcogenide waveguide platform, designed for use in long-wave IR spectrometer applications, is demonstrated, fabricated and optically characterized. The optical layers were deposited on pre-patterned dry-etched silicon pedestals. An exceptionally low waveguide propagation loss...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-02-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/11/3/201 |