Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope

Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope

In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation a...

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Bibliographic Details
Main Authors: Mingze Gao, Jiangkun Sun, Sheng Yu, Jun Feng, Xingjing Ren, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Micromachines
Subjects:
micro-shell resonator gyroscope
charge accumulation
frequency split
stiffness axis
Online Access:https://www.mdpi.com/2072-666X/14/9/1755

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https://www.mdpi.com/2072-666X/14/9/1755

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