Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope
In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation a...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-09-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/9/1755 |
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| author | Mingze Gao Jiangkun Sun Sheng Yu Jun Feng Xingjing Ren Yongmeng Zhang Xuezhong Wu Dingbang Xiao |
| author_facet | Mingze Gao Jiangkun Sun Sheng Yu Jun Feng Xingjing Ren Yongmeng Zhang Xuezhong Wu Dingbang Xiao |
| author_sort | Mingze Gao |
| collection | DOAJ |
| description | In capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation and characterization of charge accumulation, an accurate characterization method is needed to study the effect of charge and propose suppression methods. In this paper, we analyze the influence of charge accumulation on the MSRG and propose a characterization method for charge accumulation based on stiffness variation. Experiments are carried out to characterize the charge accumulation in MSRG, and the effect of temperature on the process is also investigated. In the experiment, the charge accumulation is characterized accurately by the variation of the frequency split and stiffness axes. Furthermore, the acceleration of the charge accumulation is observed at high temperatures, as is the higher additional voltage from the charge accumulation. |
| first_indexed | 2024-03-10T22:27:09Z |
| format | Article |
| id | doaj.art-89ba69f11af946859b42ada733a88068 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T22:27:09Z |
| publishDate | 2023-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-89ba69f11af946859b42ada733a880682023-11-19T12:00:11ZengMDPI AGMicromachines2072-666X2023-09-01149175510.3390/mi14091755Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator GyroscopeMingze Gao0Jiangkun Sun1Sheng Yu2Jun Feng3Xingjing Ren4Yongmeng Zhang5Xuezhong Wu6Dingbang Xiao7College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaIn capacitive microelectromechanical system (MEMS) devices, the application of dielectric materials causes long-term charging problems in the dielectric layers or substrates, which especially affect the repeatability and stability of high-performance devices. Due to the difficulties of observation and characterization of charge accumulation, an accurate characterization method is needed to study the effect of charge and propose suppression methods. In this paper, we analyze the influence of charge accumulation on the MSRG and propose a characterization method for charge accumulation based on stiffness variation. Experiments are carried out to characterize the charge accumulation in MSRG, and the effect of temperature on the process is also investigated. In the experiment, the charge accumulation is characterized accurately by the variation of the frequency split and stiffness axes. Furthermore, the acceleration of the charge accumulation is observed at high temperatures, as is the higher additional voltage from the charge accumulation.https://www.mdpi.com/2072-666X/14/9/1755micro-shell resonator gyroscopecharge accumulationfrequency splitstiffness axis |
| spellingShingle | Mingze Gao Jiangkun Sun Sheng Yu Jun Feng Xingjing Ren Yongmeng Zhang Xuezhong Wu Dingbang Xiao Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope Micromachines micro-shell resonator gyroscope charge accumulation frequency split stiffness axis |
| title | Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope |
| title_full | Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope |
| title_fullStr | Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope |
| title_full_unstemmed | Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope |
| title_short | Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope |
| title_sort | investigation of the charge accumulation based on stiffness variation of the micro shell resonator gyroscope |
| topic | micro-shell resonator gyroscope charge accumulation frequency split stiffness axis |
| url | https://www.mdpi.com/2072-666X/14/9/1755 |
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