Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review
Non-destructive measurements of high aspect ratio microscale features, especially those with internal geometries such as micro-holes, remain a challenging metrology problem that is increasing in difficulty due to the increasing requirement for more complexity and higher tolerances in such structures...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Metrology |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-8244/3/2/9 |