Achievement of High Perpendicular Anisotropy and Modification of Heat Treatment Peeling in Micron-Thickness Nd-Fe-B Films Used for Magnetic MEMS
Thick Nd-Fe-B permanent magnetic films with good perpendicular anisotropy have important applications in magnetic microelectromechanical systems (MEMSs). However, when the thickness of the Nd-Fe-B film reaches the micron level, the magnetic anisotropy and texture of NdFeB film will become worse, and...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/16/11/4071 |