Synthesis And Characterization Of Pure-Silica- Zeolite-Beta Membrane
The semiconductor industry needs low dielectric constant (low k-value) materials to more advance microprocessor and chips by reducing the size of the device features. In fabricate this context, a new material with lower k value than conventional silica ( k = 3.9 - 4.2 ) is needed in order to improve...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Brunei Darussalam
2017-11-01
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| Series: | ASEAN Journal on Science and Technology for Development |
| Subjects: | |
| Online Access: | http://www.ajstd.org/index.php/ajstd/article/view/118 |