INVESTIGATION OF THICKNESS DEPENDENCES OF REFRACTIVE INDEX FOR NANOSIZED ACETONE FILM BY ELLIPSOMETRIC METHOD

INVESTIGATION OF THICKNESS DEPENDENCES OF REFRACTIVE INDEX FOR NANOSIZED ACETONE FILM BY ELLIPSOMETRIC METHOD

On the basis of analyzing the spectrum of the ellipsometric angles ψ and Δ the investigation of thickness dependence of refractive index for nanosized acetone films on silicon surface using the photometric spectroellipsometer was carried out.

Bibliographic Details
Main Authors: N.Yu. Sdobnyakov, N.V. Novozhilov, A.S. Antonov, E.A. Voronova, O.V. Mikhailova
Format: Article
Language:Russian
Published: Tver State University 2014-11-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
Subjects:
photometric spectroellipsometer
nanosized acetone films
refractive index
thickness dependence
Online Access:http://physchemaspects.ru/archives/2014/%D0%A4%D0%A5-2014.%20%D0%A1%D0%B4%D0%BE%D0%B1%D0%BD%D1%8F%D0%BA%D0%BE%D0%B2%20%D0%9D%D0%AE%202.pdf

Internet

http://physchemaspects.ru/archives/2014/%D0%A4%D0%A5-2014.%20%D0%A1%D0%B4%D0%BE%D0%B1%D0%BD%D1%8F%D0%BA%D0%BE%D0%B2%20%D0%9D%D0%AE%202.pdf

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