Preparation and growth mechanism of ultra-thin free-standing polycrystalline diamond film based on glass carbon substrate
In these experiments, Ti, Si and glass carbon substrates were selected to prepare ultra-thin polycrystalline diamond films by microwave plasma chemical vapor deposition (MPCVD) using CH4/H2 as the reaction source. The overall morphology, surface morphology, composition and stress state of the prepar...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2023-10-01
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| Series: | Jin'gangshi yu moliao moju gongcheng |
| Subjects: | |
| Online Access: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0005 |