Analysis of retained deuterium on Be-based films: Ion implantation vs. in-situ loading
Pure Be, Be-O and Be-O-C thin coatings were deposited using high-power impulse magnetron sputtering (HiPIMS) with and without incorporation of deuterium. The coatings produced without deuterium were implanted afterwards with 15 keV 2H+ ion beams with a fluence limited to 2 × 1017 ion/cm2 in order to...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2018-12-01
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Series: | Nuclear Materials and Energy |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2352179118301613 |