A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage
In this study, a positioning stage is considered, which is actuated by four pneumatic cylinders and vertically supported by four coil-type spring isolators. Previously, we realized the base plate jerk feedback (BPJFB) to be analogues to a Master-Slave system which can synchronize the motion of the s...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2012-02-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/2/6_2_252/_pdf/-char/en |