Oxygen doping effect on wettability of diamond-like carbon films
DLC films were deposited on Ge substrates using direct ion beam deposition method, followed by investigating the influence of O _2 doping on their morphological, electrical, and structural properties. The films were doped with oxygen under flow rates of 5, 10, 20, and 40 sccm (standard cubic centime...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2021-01-01
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Series: | Materials Research Express |
Subjects: | |
Online Access: | https://doi.org/10.1088/2053-1591/abeac9 |