Oxygen doping effect on wettability of diamond-like carbon films

DLC films were deposited on Ge substrates using direct ion beam deposition method, followed by investigating the influence of O _2 doping on their morphological, electrical, and structural properties. The films were doped with oxygen under flow rates of 5, 10, 20, and 40 sccm (standard cubic centime...

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Bibliographic Details
Main Authors: R Zarei Moghadam, M H Ehsani, H Rezagholipour Dizaji, P Kameli, M Jannesari
Format: Article
Language:English
Published: IOP Publishing 2021-01-01
Series:Materials Research Express
Subjects:
Online Access:https://doi.org/10.1088/2053-1591/abeac9