Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became widely used in large-volume products today. However...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/12/4/163 |