High-Precision Ion Beam Figuring of X-Ray Plane Mirrors for the Bendable KB Focusing System
Two trapezoidal plane mirrors of 240 mm in length were fabricated by ion beam figuring (IBF) technology for application in a bendable KB focusing system. The correction of surface height and slope errors in different spatial frequency ranges of the mirrors was studied systematically. After one to tw...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-05-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.865411/full |