Compositional Modification of Epitaxial Pb(Zr,Ti)O3 Thin Films for High‐Performance Piezoelectric Energy Harvesters

Compositional Modification of Epitaxial Pb(Zr,Ti)O3 Thin Films for High‐Performance Piezoelectric Energy Harvesters

Abstract In this study, Piezoelectric energy harvesters (PEHs) are fabricated based on epitaxial Pb(Zr,Ti)O3 (PZT) thin films deposited by an RF magnetron sputtering with varied Zr/[Zr+Ti] ratio. For a compatibility with micro‐electromechanical systems, the epitaxial PZT thin films are deposited on...

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Bibliographic Details
Main Authors: Sang Hyo Kweon, Eun‐Ji Kim, Goon Tan, Isaku Kanno
Format: Article
Language:English
Published: Wiley-VCH 2024-01-01
Series:Advanced Materials Interfaces
Subjects:
epitaxial growth
piezoelectric energy harvesters
PZT composition
Si substrates
transverse piezoelectricity
Online Access:https://doi.org/10.1002/admi.202300634

Internet

https://doi.org/10.1002/admi.202300634

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