Influence of Pressure-Equalizing Groove on Static Load Performance of Aerostatic Guideway
The load capacity and static stiffness of the existing air hydrostatic guideways are relatively low, and the static performance of the air film is degraded when external forces are increased during the process. Therefore, this study considered an aerostatic guideway of an ultra-precision micromachin...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Isfahan University of Technology
2023-03-01
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Series: | Journal of Applied Fluid Mechanics |
Subjects: | |
Online Access: | https://www.jafmonline.net/article_2196_2ed2134e83f56e45f3320d7becb204f1.pdf |