Ghost Beam Suppression in Deep Frequency Modulation Interferometry for Compact On-Axis Optical Heads
We present a compact optical head design for wide-range and low noise displacement sensing using deep frequency modulation interferometry (DFMI). The on-axis beam topology is realised in a quasi-monolithic component and relies on cube beamsplitters and beam transmission through perpendicular surface...
Main Authors: | , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-03-01
|
Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/21/5/1708 |