Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer –
Recently, high-precision and in-process surface topography measurement methods are required in the field of precision machining. Laser inverse scattering has been reported as a method satisfying these characteristics. However, the dynamic range and spatial resolution of this method depend on the wav...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001562 |