Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer –
Recently, high-precision and in-process surface topography measurement methods are required in the field of precision machining. Laser inverse scattering has been reported as a method satisfying these characteristics. However, the dynamic range and spatial resolution of this method depend on the wav...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001562 |
| _version_ | 1819195427329671168 |
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| author | Satoshi Itakura Tsutomu Uenohara Yasuhiro Mizutani Yasuhiro Takaya |
| author_facet | Satoshi Itakura Tsutomu Uenohara Yasuhiro Mizutani Yasuhiro Takaya |
| author_sort | Satoshi Itakura |
| collection | DOAJ |
| description | Recently, high-precision and in-process surface topography measurement methods are required in the field of precision machining. Laser inverse scattering has been reported as a method satisfying these characteristics. However, the dynamic range and spatial resolution of this method depend on the wavelength of the light source, which limits the surface topography that can be measured when using a single-wavelength light source. This limitation can be removed by using multi-wavelength laser. When a multi-wavelength laser is used as a light source, a method to spectrally disperse surface image of the sample and Fraunhofer diffraction pattern is necessary.In this paper, we propose a method for spectroscopy of surface image and diffraction pattern using VIPA spectroscopy. Then, the diffraction pattern using the optical frequency comb as a light source was spectrally analyzed with the proposed method and it was confirmed that the diffraction pattern of each wavelength can be measured. |
| first_indexed | 2024-12-23T02:12:35Z |
| format | Article |
| id | doaj.art-8b80d689125a4c55ad8d9bae57842c82 |
| institution | Directory Open Access Journal |
| issn | 2665-9174 |
| language | English |
| last_indexed | 2024-12-23T02:12:35Z |
| publishDate | 2021-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Measurement: Sensors |
| spelling | doaj.art-8b80d689125a4c55ad8d9bae57842c822022-12-21T18:03:45ZengElsevierMeasurement: Sensors2665-91742021-12-0118100193Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer –Satoshi Itakura0Tsutomu Uenohara1Yasuhiro Mizutani2Yasuhiro Takaya3Corresponding author.; Osaka University, 2-1 Yamadaoka, Suita, Osaka, 565-0871, JapanOsaka University, 2-1 Yamadaoka, Suita, Osaka, 565-0871, JapanOsaka University, 2-1 Yamadaoka, Suita, Osaka, 565-0871, JapanOsaka University, 2-1 Yamadaoka, Suita, Osaka, 565-0871, JapanRecently, high-precision and in-process surface topography measurement methods are required in the field of precision machining. Laser inverse scattering has been reported as a method satisfying these characteristics. However, the dynamic range and spatial resolution of this method depend on the wavelength of the light source, which limits the surface topography that can be measured when using a single-wavelength light source. This limitation can be removed by using multi-wavelength laser. When a multi-wavelength laser is used as a light source, a method to spectrally disperse surface image of the sample and Fraunhofer diffraction pattern is necessary.In this paper, we propose a method for spectroscopy of surface image and diffraction pattern using VIPA spectroscopy. Then, the diffraction pattern using the optical frequency comb as a light source was spectrally analyzed with the proposed method and it was confirmed that the diffraction pattern of each wavelength can be measured.http://www.sciencedirect.com/science/article/pii/S2665917421001562Laser inverse scatteringSurface topography measurementOptical frequency combVIPA spectroscopy |
| spellingShingle | Satoshi Itakura Tsutomu Uenohara Yasuhiro Mizutani Yasuhiro Takaya Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer – Measurement: Sensors Laser inverse scattering Surface topography measurement Optical frequency comb VIPA spectroscopy |
| title | Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer – |
| title_full | Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer – |
| title_fullStr | Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer – |
| title_full_unstemmed | Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer – |
| title_short | Fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy - Basic study of diffraction pattern spectroscopy by VIPA Spectrometer – |
| title_sort | fundamental study of surface topography measurement by broadband optical frequency comb scattering spectroscopy basic study of diffraction pattern spectroscopy by vipa spectrometer |
| topic | Laser inverse scattering Surface topography measurement Optical frequency comb VIPA spectroscopy |
| url | http://www.sciencedirect.com/science/article/pii/S2665917421001562 |
| work_keys_str_mv | AT satoshiitakura fundamentalstudyofsurfacetopographymeasurementbybroadbandopticalfrequencycombscatteringspectroscopybasicstudyofdiffractionpatternspectroscopybyvipaspectrometer AT tsutomuuenohara fundamentalstudyofsurfacetopographymeasurementbybroadbandopticalfrequencycombscatteringspectroscopybasicstudyofdiffractionpatternspectroscopybyvipaspectrometer AT yasuhiromizutani fundamentalstudyofsurfacetopographymeasurementbybroadbandopticalfrequencycombscatteringspectroscopybasicstudyofdiffractionpatternspectroscopybyvipaspectrometer AT yasuhirotakaya fundamentalstudyofsurfacetopographymeasurementbybroadbandopticalfrequencycombscatteringspectroscopybasicstudyofdiffractionpatternspectroscopybyvipaspectrometer |