Nanoscale cutting using self-excited microcantilever

Abstract The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes...

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Bibliographic Details
Main Authors: Rui Yang, Ichiro Ogura, ZhenYan Jiang, LinJun An, Kiwamu Ashida, Hiroshi Yabuno
Format: Article
Language:English
Published: Nature Portfolio 2022-01-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-021-04085-y