Nanoscale cutting using self-excited microcantilever
Abstract The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2022-01-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-021-04085-y |
| _version_ | 1818753791434948608 |
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| author | Rui Yang Ichiro Ogura ZhenYan Jiang LinJun An Kiwamu Ashida Hiroshi Yabuno |
| author_facet | Rui Yang Ichiro Ogura ZhenYan Jiang LinJun An Kiwamu Ashida Hiroshi Yabuno |
| author_sort | Rui Yang |
| collection | DOAJ |
| description | Abstract The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes to enable the excitation force applied by an actuator to be transferred efficiently to the tip of the microcantilever for the cutting process. A diamond abrasive that is set on the tip is also fabricated using a focused ion beam technique to improve the cutting effect. The natural frequency of the microcantilever is modulated based on the pressing load. Under conventional external excitation conditions, to maintain the microcantilever in its resonant state, it is necessary to vary the excitation frequency in accordance with the modulation. In this study, rather than using external excitation, the self-excitation cutting method is proposed to overcome this difficulty. The self-excited oscillation is produced by appropriate setting of the phase difference between the deflection signal of the microcantilever and the feedback signal for the actuator. In addition, it is demonstrated experimentally that the change in the phase difference enables us to control the amplitude of the self-excitation. As a result, control of the cutting depth is achieved via changes in the phase difference. |
| first_indexed | 2024-12-18T05:12:58Z |
| format | Article |
| id | doaj.art-8b8f234d4dfc44aea65d552b5e8766bc |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-12-18T05:12:58Z |
| publishDate | 2022-01-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-8b8f234d4dfc44aea65d552b5e8766bc2022-12-21T21:19:50ZengNature PortfolioScientific Reports2045-23222022-01-0112111210.1038/s41598-021-04085-yNanoscale cutting using self-excited microcantileverRui Yang0Ichiro Ogura1ZhenYan Jiang2LinJun An3Kiwamu Ashida4Hiroshi Yabuno5Graduate School of Systems and Information Engineering, University of Tsukuba, 1-1-1Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and TechnologyGraduate School of Systems and Information Engineering, University of Tsukuba, 1-1-1Graduate School of Systems and Information Engineering, University of Tsukuba, 1-1-1Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and TechnologyGraduate School of Systems and Information Engineering, University of Tsukuba, 1-1-1Abstract The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes to enable the excitation force applied by an actuator to be transferred efficiently to the tip of the microcantilever for the cutting process. A diamond abrasive that is set on the tip is also fabricated using a focused ion beam technique to improve the cutting effect. The natural frequency of the microcantilever is modulated based on the pressing load. Under conventional external excitation conditions, to maintain the microcantilever in its resonant state, it is necessary to vary the excitation frequency in accordance with the modulation. In this study, rather than using external excitation, the self-excitation cutting method is proposed to overcome this difficulty. The self-excited oscillation is produced by appropriate setting of the phase difference between the deflection signal of the microcantilever and the feedback signal for the actuator. In addition, it is demonstrated experimentally that the change in the phase difference enables us to control the amplitude of the self-excitation. As a result, control of the cutting depth is achieved via changes in the phase difference.https://doi.org/10.1038/s41598-021-04085-y |
| spellingShingle | Rui Yang Ichiro Ogura ZhenYan Jiang LinJun An Kiwamu Ashida Hiroshi Yabuno Nanoscale cutting using self-excited microcantilever Scientific Reports |
| title | Nanoscale cutting using self-excited microcantilever |
| title_full | Nanoscale cutting using self-excited microcantilever |
| title_fullStr | Nanoscale cutting using self-excited microcantilever |
| title_full_unstemmed | Nanoscale cutting using self-excited microcantilever |
| title_short | Nanoscale cutting using self-excited microcantilever |
| title_sort | nanoscale cutting using self excited microcantilever |
| url | https://doi.org/10.1038/s41598-021-04085-y |
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