Nanoscale cutting using self-excited microcantilever
Abstract The application of self-excitation is proposed to improve the efficiency of the nanoscale cutting procedure based on use of a microcantilever in atomic force microscopy. The microcantilever shape is redesigned so that it can be used to produce vibration amplitudes with sufficient magnitudes...
Main Authors: | Rui Yang, Ichiro Ogura, ZhenYan Jiang, LinJun An, Kiwamu Ashida, Hiroshi Yabuno |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2022-01-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-021-04085-y |
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