Robust Optimization of a MEMS Accelerometer Considering Temperature Variations
A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accelerometer are determined, and thermal deformation o...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2015-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/15/3/6342 |