Hydrogen-Terminated Single Crystal Diamond MOSFET with a Bilayer Dielectric of Gd<sub>2</sub>O<sub>3</sub>/Al<sub>2</sub>O<sub>3</sub>

Hydrogen-Terminated Single Crystal Diamond MOSFET with a Bilayer Dielectric of Gd<sub>2</sub>O<sub>3</sub>/Al<sub>2</sub>O<sub>3</sub>

In this paper, two dielectric layers of Al<sub>2</sub>O<sub>3</sub> and Gd<sub>2</sub>O<sub>3</sub> were prepared by an atomic layer deposition (ALD) and magnetron sputtering deposition (SD), respectively. Based on this, a metal-oxide-semiconductor fie...

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Bibliographic Details
Main Authors: Xiaoyong Lv, Wei Wang, Yanfeng Wang, Genqiang Chen, Shi He, Minghui Zhang, Hongxing Wang
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Crystals
Subjects:
hydrogen-terminated diamond
MOSFET
Gd<sub>2</sub>O<sub>3</sub>
2DHG
Online Access:https://www.mdpi.com/2073-4352/13/5/783

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https://www.mdpi.com/2073-4352/13/5/783

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