Influencing Effects of Fabrication Errors on Performances of the Dielectric Metalens
Despite continuous developments of manufacturing technology for micro-devices and nano-devices, fabrication errors still exist during the manufacturing process. To reduce manufacturing costs and save time, it is necessary to analyze the effects of fabrication errors on the performances of micro-/nan...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/12/2098 |