Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes
Abstract Nanoscale cantilevers (nanocantilevers) made from carbon nanotubes (CNTs) provide tremendous benefits in sensing and electromagnetic applications. This nanoscale structure is generally fabricated using chemical vapor deposition and/or dielectrophoresis, which contain manual, time-consuming...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2023-03-01
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Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-023-00507-1 |