Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes

Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes

Abstract Nanoscale cantilevers (nanocantilevers) made from carbon nanotubes (CNTs) provide tremendous benefits in sensing and electromagnetic applications. This nanoscale structure is generally fabricated using chemical vapor deposition and/or dielectrophoresis, which contain manual, time-consuming...

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Bibliographic Details
Main Authors:	Yukihiro Tadokoro, Keita Funayama, Keisuke Kawano, Atsushi Miura, Jun Hirotani, Yutaka Ohno, Hiroya Tanaka
Format:	Article
Language:	English
Published:	Nature Publishing Group 2023-03-01
Series:	Microsystems & Nanoengineering
Online Access:	https://doi.org/10.1038/s41378-023-00507-1

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