Bottom-Gated ZnO TFT Pressure Sensor with 1D Nanorods
In this study, a bottom-gated ZnO thin film transistor (TFT) pressure sensor with nanorods (NRs) is suggested. The NRs are formed on a planar channel of the TFT by hydrothermal synthesis for the mediators of pressure amplification. The fabricated devices show enhanced sensitivity by 16~20 times bett...
Main Authors: | Ki-Nam Kim, Woon-San Ko, Jun-Ho Byun, Do-Yeon Lee, Jun-Kyo Jeong, Hi-Deok Lee, Ga-Won Lee |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-11-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/22/22/8907 |
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