Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer

Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer

The temperature sensitivity is one of the critical parameters for the thin film bulk acoustic resonator (FBAR) based temperature sensors. In this work, FBARs with Au/Fe _0.8 Ga _0.2 /Ti/AlN/Mo structure are developed. The size effect of the Ti insertion layer on the temperature sensitivity of the de...

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Bibliographic Details
Main Authors: Wenkui Lin, Xiaofan Yun, Xiaoyi Wang, Zhongming Zeng, Yiqun Wang, Xiaodong Zhang, Chunhong Zeng, Baoshun Zhang
Format: Article
Language:English
Published: IOP Publishing 2021-01-01
Series:Materials Research Express
Subjects:
FBAR
temperature sensor
Ti
TCE
size effect
Online Access:https://doi.org/10.1088/2053-1591/ac2099

Internet

https://doi.org/10.1088/2053-1591/ac2099

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