Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment

Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment

The paper presents a program for simulating electron scattering in layered materials <b><i>ProxyFn</i></b>. Calculations show that the absorbed energy density is three-dimensional, while the contribution of the forward-scattered electrons is better described by a power functi...

Full description

Bibliographic Details
Main Authors: Alexander A. Svintsov, Maxim A. Knyazev, Sergey I. Zaitsev
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Materials
Subjects:
electron-beam lithography
Monte Carlo method
proximity function
electrons scattering
Online Access:https://www.mdpi.com/1996-1944/15/11/3888

Internet

https://www.mdpi.com/1996-1944/15/11/3888

Similar Items