Research of selective etching in LiNbO3 using proton-exchanged wet etching technique

Research of selective etching in LiNbO3 using proton-exchanged wet etching technique

Lithium niobate material (LN) has shown great application potentials in the fabrication of integrated optical devices due to its excellent physical properties, especially with the occurrence of lithium niobate-on-insulator (LNOI) substrate. However, the greatest challenge of micro/nano optical devic...

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Bibliographic Details
Main Authors: Ying Li, Tian Lan, Dengcai Yang, Meihua Xiang, Jingjing Dai, Chong Li, Zhiyong Wang
Format: Article
Language:English
Published: IOP Publishing 2020-01-01
Series:Materials Research Express
Subjects:
lithium niobate (LN)
optical waveguide
proton exchange (PE)
wet etching
Online Access:https://doi.org/10.1088/2053-1591/ab8e70

Internet

https://doi.org/10.1088/2053-1591/ab8e70

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