Modeling and Optimization of the Blade Structural Parameters for a Turbomolecular Pump
The development of high-performance mass spectrometer and vacuum coating technology has placed higher demand on the vacuum level of turbomolecular pumps (TMPs), which are required to possess a greater compression ratio and faster pumping speed. There exists a relation of “as one falls, another rises...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/11/5/517 |