Study on sinusoidal estimation deviation of electrostatic actuated MEMS mirror torsion angle
Electrostatic MEMS micromirrors usually work in resonant state to obtain large amplitude of torsion angle. The real-time prediction of MEMS micromirror torsion angle is calculated according to the measured resonant amplitude and phase under the assumption that the relationship between the torsion an...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | zho |
| Published: |
EDP Sciences
2023-04-01
|
| Series: | Xibei Gongye Daxue Xuebao |
| Subjects: | |
| Online Access: | https://www.jnwpu.org/articles/jnwpu/full_html/2023/02/jnwpu2023412p338/jnwpu2023412p338.html |