Study on sinusoidal estimation deviation of electrostatic actuated MEMS mirror torsion angle
Electrostatic MEMS micromirrors usually work in resonant state to obtain large amplitude of torsion angle. The real-time prediction of MEMS micromirror torsion angle is calculated according to the measured resonant amplitude and phase under the assumption that the relationship between the torsion an...
| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | zho |
| Publicado em: |
EDP Sciences
2023-04-01
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| coleção: | Xibei Gongye Daxue Xuebao |
| Assuntos: | |
| Acesso em linha: | https://www.jnwpu.org/articles/jnwpu/full_html/2023/02/jnwpu2023412p338/jnwpu2023412p338.html |