Analysis of Deflection Enhancement Using Epsilon Assembly Microcantilevers Based Sensors
The present work analyzes theoretically and verifies the advantage of utilizing ε-microcantilever assemblies in microsensing applications. The deflection profile of these innovative ε-assembly microcantilevers is compared with that of the rectangular microcantilever and modified triangular microcant...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2011-09-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/11/10/9260/ |