Visible and Near-IR Nano-Optical Components and Systems in CMOS
Integration of complex optical systems operating in the visible and near-IR range (VIS/NIR), realized in a CMOS fabrication process in an absolutely ‘no change’ approach, can have a transformative impact in enabling a new class of miniaturized, low-cost, smart optical sensors a...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2021-01-01
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Series: | IEEE Open Journal of the Solid-State Circuits Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9552953/ |