Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy

Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy

A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm<sup>2</sup> large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 × 34 multi-lenses fabricated via deep X-ray lithography. Th...

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Bibliographic Details
Main Authors: Talgat Mamyrbayev, Alexander Opolka, Alexey Ershov, Josephine Gutekunst, Pascal Meyer, Katsumasa Ikematsu, Atsushi Momose, Arndt Last
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Applied Sciences
Subjects:
two-dimensional compound refractive lens array
deep X-ray lithography
scanning transmission X-ray microscopy
sub-pixel resolution
Online Access:https://www.mdpi.com/2076-3417/10/12/4132

Internet

https://www.mdpi.com/2076-3417/10/12/4132

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