Realization of p-type ZnAgO:N thin films on flexible polyimide substrates through co-sputtering for wearable thermoelectric applications
In this study, we deposited a series of Ag and N co-doped ZnO thin films (ZnAgO:N) with different Ag atomic percentage (at. %) ratios on flexible polyimide (PI) substrates to realize p-type ZnO-based thin films for wearable thermoelectric applications by in situ co-sputtering of ZnO and Ag by RF and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-07-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5140618 |