Mechanically-flexible wafer-scale integrated-photonics fabrication platform
Abstract The field of integrated photonics has advanced rapidly due to wafer-scale fabrication, with integrated-photonics platforms and fabrication processes being demonstrated at both infrared and visible wavelengths. However, these demonstrations have primarily focused on fabrication processes on...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2024-05-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-024-61055-w |