Optimal Design of a Leaf Flexure Compliant Mechanism Based on 2-DOF Tuned Mass Damping Stage Analysis

Optimal Design of a Leaf Flexure Compliant Mechanism Based on 2-DOF Tuned Mass Damping Stage Analysis

This study proposed an innovative design of a leaf flexural-based 2-DOF tuned mass damping stage that can be integrated into a micro-electromechanical system precision positioning stage to reduce the displacement response of the precision positioning stage excited by a specific vibration frequency a...

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Bibliographic Details
Main Authors: Yung-Sheng Chang, Vu N. D. Kieu, Shyh-Chour Huang
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Micromachines
Subjects:
leaf flexure
tuned mass damper
finite elements method
Taguchi’s optimization method
Online Access:https://www.mdpi.com/2072-666X/13/6/817

Internet

https://www.mdpi.com/2072-666X/13/6/817

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