The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness
The shift of resonant frequency due to the particle adsorption is the mass sensing mechanism of a micro/nano-resonator. The sensitivity and resolution are the two key performance indicators of a mass resonator. An effective method to significantly enhance the sensitivity of a mass resonator is prese...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-06-01
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| Series: | Results in Physics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379723002760 |