Nanolithographic Fabrication Technologies for Network-Based Biocomputation Devices

Network-based biocomputation (NBC) relies on accurate guiding of biological agents through nanofabricated channels produced by lithographic patterning techniques. Here, we report on the large-scale, wafer-level fabrication of optimized microfluidic channel networks (NBC networks) using electron-beam...

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Bibliographic Details
Main Authors: Christoph R. Meinecke, Georg Heldt, Thomas Blaudeck, Frida W. Lindberg, Falco C. M. J. M. van Delft, Mohammad Ashikur Rahman, Aseem Salhotra, Alf Månsson, Heiner Linke, Till Korten, Stefan Diez, Danny Reuter, Stefan E. Schulz
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/3/1046