A Piezoelectric MEMS Microgripper for Arbitrary XY Trajectory
In this paper, a piezoelectric microgripper for arbitrary 2D trajectory is proposed. The desired trajectory of the specimen under consideration was obtained by the deformability of a structure consisting of 16 straight beams and 12 C-structures. The mechanical action that deforms the structure was o...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/11/1888 |