PREPARATION AND OPTICAL PROPERTIES OF NANOSTRUCTURED ANTIREFLECTIVE LAYERS FOR Si-PHOTODEVICES
The layers of nanoporous silicon are formed by using the method of electrochemical anodization on the surface of silicon polished wafers with the surface highly-doped n+ layer. The layers were fabricated at the constant direct current using the anodization process and at the current, which varies ac...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Al-Farabi Kazakh National University
2009-12-01
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| Series: | Вестник. Серия физическая |
| Online Access: | https://bph.kaznu.kz/index.php/zhuzhu/article/view/229 |