Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation

Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation

The growth of AlGaN has been extensively studied, but corresponding research related to the effect of AlN substrate surface has rarely been reported in literature. In this article, the effects of AlN substrate surface on deposition of AlGaN films were investigated by molecular dynamics (MD) simulati...

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Bibliographic Details
Main Authors: Libin Zhang, Han Yan, Guo Zhu, Sheng Liu, Zhiyin Gan, Zili Zhang
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Crystals
Subjects:
AlGaN
molecular dynamics
substrate surface
surface morphology
atomic structure
Online Access:http://www.mdpi.com/2073-4352/8/7/279

Internet

http://www.mdpi.com/2073-4352/8/7/279

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