Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation
The growth of AlGaN has been extensively studied, but corresponding research related to the effect of AlN substrate surface has rarely been reported in literature. In this article, the effects of AlN substrate surface on deposition of AlGaN films were investigated by molecular dynamics (MD) simulati...
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| Format: | Article |
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MDPI AG
2018-07-01
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| Series: | Crystals |
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| Online Access: | http://www.mdpi.com/2073-4352/8/7/279 |
| _version_ | 1811301593749913600 |
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| author | Libin Zhang Han Yan Guo Zhu Sheng Liu Zhiyin Gan Zili Zhang |
| author_facet | Libin Zhang Han Yan Guo Zhu Sheng Liu Zhiyin Gan Zili Zhang |
| author_sort | Libin Zhang |
| collection | DOAJ |
| description | The growth of AlGaN has been extensively studied, but corresponding research related to the effect of AlN substrate surface has rarely been reported in literature. In this article, the effects of AlN substrate surface on deposition of AlGaN films were investigated by molecular dynamics (MD) simulations. (0001) Al-terminated and (0001¯) N-terminated AlN were considered as substrates. The quality of surface morphology and atomic scale structure of deposited AlGaN film are discussed in detail. The results show that the surface morphology and crystal quality of AlGaN film grown on (0001) Al-terminated AlN surface are better than for that grown on (0001¯) N-terminated AlN surface under various growing temperatures and Al/Ga injection ratios between Al and Ga. This can be attributed to the higher mobility of Al and Ga adatoms on the (0001) Al-terminated AlN surface. These findings can provide guidance for the preparation of high-quality AlGaN thin films on AlN substrate. |
| first_indexed | 2024-04-13T07:11:22Z |
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| id | doaj.art-8db55a03246a4b4bb346a4ec95914081 |
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| issn | 2073-4352 |
| language | English |
| last_indexed | 2024-04-13T07:11:22Z |
| publishDate | 2018-07-01 |
| publisher | MDPI AG |
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| series | Crystals |
| spelling | doaj.art-8db55a03246a4b4bb346a4ec959140812022-12-22T02:56:51ZengMDPI AGCrystals2073-43522018-07-018727910.3390/cryst8070279cryst8070279Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics SimulationLibin Zhang0Han Yan1Guo Zhu2Sheng Liu3Zhiyin Gan4Zili Zhang5School of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan 430074, ChinaSchool of Mechanical & Electronic Engineering, Wuhan University of Technology, Wuhan 430070, ChinaSchool of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan 430074, ChinaSchool of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, ChinaSchool of Mechanical Science & Engineering, Huazhong University of Science & Technology, Wuhan 430074, ChinaSchool of Science, China University of Geosciences, Beijing 100083, ChinaThe growth of AlGaN has been extensively studied, but corresponding research related to the effect of AlN substrate surface has rarely been reported in literature. In this article, the effects of AlN substrate surface on deposition of AlGaN films were investigated by molecular dynamics (MD) simulations. (0001) Al-terminated and (0001¯) N-terminated AlN were considered as substrates. The quality of surface morphology and atomic scale structure of deposited AlGaN film are discussed in detail. The results show that the surface morphology and crystal quality of AlGaN film grown on (0001) Al-terminated AlN surface are better than for that grown on (0001¯) N-terminated AlN surface under various growing temperatures and Al/Ga injection ratios between Al and Ga. This can be attributed to the higher mobility of Al and Ga adatoms on the (0001) Al-terminated AlN surface. These findings can provide guidance for the preparation of high-quality AlGaN thin films on AlN substrate.http://www.mdpi.com/2073-4352/8/7/279AlGaNmolecular dynamicssubstrate surfacesurface morphologyatomic structure |
| spellingShingle | Libin Zhang Han Yan Guo Zhu Sheng Liu Zhiyin Gan Zili Zhang Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation Crystals AlGaN molecular dynamics substrate surface surface morphology atomic structure |
| title | Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation |
| title_full | Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation |
| title_fullStr | Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation |
| title_full_unstemmed | Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation |
| title_short | Effect of Substrate Surface on Deposition of AlGaN: A Molecular Dynamics Simulation |
| title_sort | effect of substrate surface on deposition of algan a molecular dynamics simulation |
| topic | AlGaN molecular dynamics substrate surface surface morphology atomic structure |
| url | http://www.mdpi.com/2073-4352/8/7/279 |
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