Band-modulation of MgZnO/ZnO Metal-semiconductor-metal Photodetectors
Magnesium (Mg) diffusion behavior on the band modulation of MgxZn1-xO/ZnO metal-semiconductor-metal photodetectors (MSM-PDs) was studied. As the annealing temperature increases, Mg atoms diffuse from MgxZn1-xO into the underlying ZnO layer, which modulates the detection band of the fabricated MSM-PD...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | ITM Web of Conferences |
| Online Access: | https://doi.org/10.1051/itmconf/20181702006 |