A thin-film temperature sensor based on a flexible electrode and substrate

A thin-film temperature sensor based on a flexible electrode and substrate

Abstract Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process...

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Bibliographic Details
Main Authors: Zhaojun Liu, Bian Tian, Bingfei Zhang, Jiangjiang Liu, Zhongkai Zhang, Song Wang, Yunyun Luo, Libo Zhao, Peng Shi, Qijing Lin, Zhuangde Jiang
Format: Article
Language:English
Published: Nature Publishing Group 2021-06-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-021-00271-0

Internet

https://doi.org/10.1038/s41378-021-00271-0

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