A thin-film temperature sensor based on a flexible electrode and substrate
Abstract Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-06-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-021-00271-0 |
| _version_ | 1819100751458205696 |
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| author | Zhaojun Liu Bian Tian Bingfei Zhang Jiangjiang Liu Zhongkai Zhang Song Wang Yunyun Luo Libo Zhao Peng Shi Qijing Lin Zhuangde Jiang |
| author_facet | Zhaojun Liu Bian Tian Bingfei Zhang Jiangjiang Liu Zhongkai Zhang Song Wang Yunyun Luo Libo Zhao Peng Shi Qijing Lin Zhuangde Jiang |
| author_sort | Zhaojun Liu |
| collection | DOAJ |
| description | Abstract Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients. |
| first_indexed | 2024-12-22T01:07:45Z |
| format | Article |
| id | doaj.art-8dba6f4d13b744e6a7ad85cda5d47b7a |
| institution | Directory Open Access Journal |
| issn | 2055-7434 |
| language | English |
| last_indexed | 2024-12-22T01:07:45Z |
| publishDate | 2021-06-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj.art-8dba6f4d13b744e6a7ad85cda5d47b7a2022-12-21T18:44:03ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342021-06-017111410.1038/s41378-021-00271-0A thin-film temperature sensor based on a flexible electrode and substrateZhaojun Liu0Bian Tian1Bingfei Zhang2Jiangjiang Liu3Zhongkai Zhang4Song Wang5Yunyun Luo6Libo Zhao7Peng Shi8Qijing Lin9Zhuangde Jiang10State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong UniversityAbstract Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.https://doi.org/10.1038/s41378-021-00271-0 |
| spellingShingle | Zhaojun Liu Bian Tian Bingfei Zhang Jiangjiang Liu Zhongkai Zhang Song Wang Yunyun Luo Libo Zhao Peng Shi Qijing Lin Zhuangde Jiang A thin-film temperature sensor based on a flexible electrode and substrate Microsystems & Nanoengineering |
| title | A thin-film temperature sensor based on a flexible electrode and substrate |
| title_full | A thin-film temperature sensor based on a flexible electrode and substrate |
| title_fullStr | A thin-film temperature sensor based on a flexible electrode and substrate |
| title_full_unstemmed | A thin-film temperature sensor based on a flexible electrode and substrate |
| title_short | A thin-film temperature sensor based on a flexible electrode and substrate |
| title_sort | thin film temperature sensor based on a flexible electrode and substrate |
| url | https://doi.org/10.1038/s41378-021-00271-0 |
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