A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection

A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection

Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes,...

Full description

Bibliographic Details
Main Authors: Peitao Dong, Jianbin Su, Haoxu Wang, Shengyi Li, Xuezhong Wu, Liqiang Xie
Format: Article
Language:English
Published: MDPI AG 2010-03-01
Series:Sensors
Subjects:
quartz micromachined gyroscope
cross-fork
shear stress detection
inertial sensor
Coriolis’ force
anisotropic etching
aperture mask
Online Access:http://www.mdpi.com/1424-8220/10/3/1573/

Internet

http://www.mdpi.com/1424-8220/10/3/1573/

Similar Items