A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection
Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes,...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2010-03-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/10/3/1573/ |
| _version_ | 1811264084243382272 |
|---|---|
| author | Peitao Dong Jianbin Su Haoxu Wang Shengyi Li Xuezhong Wu Liqiang Xie |
| author_facet | Peitao Dong Jianbin Su Haoxu Wang Shengyi Li Xuezhong Wu Liqiang Xie |
| author_sort | Peitao Dong |
| collection | DOAJ |
| description | Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes, which have two separate sense electrodes on each sidewall, there is only one electrode on each sidewall of the sense beam. As a result, the fabrication of the electrodes is simplified and the structure can be easily miniaturized. In order to increase sensitivity, a pair of proof masses is attached to the ends of the drive beam, and the sense beam has a tapered design. The structure is etched from a z-cut quartz wafer and the electrodes are realized by direct evaporation using the aperture mask method. The drive mode frequency of the prototype is 13.38 kHz, and the quality factor is approximately 1,000 in air. Therefore, the gyroscope can work properly without a vacuum package. The measurement ability of the shear stress detection design scheme is validated by the Coriolis’ force test. The performance of the sensor is characterized on a precision rate table using a specially designed readout circuit. The experimentally obtained scale factor is 1.45 mV/°/s and the nonlinearity is 3.6% in range of ±200 °/s. |
| first_indexed | 2024-04-12T19:57:56Z |
| format | Article |
| id | doaj.art-8dd5ed0cc89340f59ae818e5db0b9cbc |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-12T19:57:56Z |
| publishDate | 2010-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-8dd5ed0cc89340f59ae818e5db0b9cbc2022-12-22T03:18:37ZengMDPI AGSensors1424-82202010-03-011031573158810.3390/s100301573A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress DetectionPeitao DongJianbin SuHaoxu WangShengyi LiXuezhong WuLiqiang XieHere we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes, which have two separate sense electrodes on each sidewall, there is only one electrode on each sidewall of the sense beam. As a result, the fabrication of the electrodes is simplified and the structure can be easily miniaturized. In order to increase sensitivity, a pair of proof masses is attached to the ends of the drive beam, and the sense beam has a tapered design. The structure is etched from a z-cut quartz wafer and the electrodes are realized by direct evaporation using the aperture mask method. The drive mode frequency of the prototype is 13.38 kHz, and the quality factor is approximately 1,000 in air. Therefore, the gyroscope can work properly without a vacuum package. The measurement ability of the shear stress detection design scheme is validated by the Coriolis’ force test. The performance of the sensor is characterized on a precision rate table using a specially designed readout circuit. The experimentally obtained scale factor is 1.45 mV/°/s and the nonlinearity is 3.6% in range of ±200 °/s.http://www.mdpi.com/1424-8220/10/3/1573/quartz micromachined gyroscopecross-forkshear stress detectioninertial sensorCoriolis’ forceanisotropic etchingaperture mask |
| spellingShingle | Peitao Dong Jianbin Su Haoxu Wang Shengyi Li Xuezhong Wu Liqiang Xie A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection Sensors quartz micromachined gyroscope cross-fork shear stress detection inertial sensor Coriolis’ force anisotropic etching aperture mask |
| title | A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection |
| title_full | A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection |
| title_fullStr | A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection |
| title_full_unstemmed | A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection |
| title_short | A Z-axis Quartz Cross-fork Micromachined Gyroscope Based on Shear Stress Detection |
| title_sort | z axis quartz cross fork micromachined gyroscope based on shear stress detection |
| topic | quartz micromachined gyroscope cross-fork shear stress detection inertial sensor Coriolis’ force anisotropic etching aperture mask |
| url | http://www.mdpi.com/1424-8220/10/3/1573/ |
| work_keys_str_mv | AT peitaodong azaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT jianbinsu azaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT haoxuwang azaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT shengyili azaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT xuezhongwu azaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT liqiangxie azaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT peitaodong zaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT jianbinsu zaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT haoxuwang zaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT shengyili zaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT xuezhongwu zaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection AT liqiangxie zaxisquartzcrossforkmicromachinedgyroscopebasedonshearstressdetection |